The multi-mode gas cluster ion source (GCIS) is designed to operate in both Ar n + cluster and Ar + monatomic modes making it suitable for sputter cleaning and depth profiling organic, inorganic ...
making Ar + monatomic mode key for depth profiling in realistic experimental times. Ion acceleration voltage can be varied between 500 eV and 8 keV. Charge build-up repels the small, mobile positive ...
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